Metrology Systems
Four Port Helium Leak Comparison Calibration System
Overview
VTI’s Four Port Helium Leak Calibration System is engineered to provide reliable in-house recalibration and certification of Helium Calibrated Leaks.
This fully automated system is based on a Helium Mass Spectrometer Leak detector and utilizes the “comparison” method of calibration. The “comparison” method uses a “standard” leak of known leak rate to determine the unknown Unit Under Test (UUT) leak rate.
The system is capable of controlling the UUT and the two standards, a primary standard and a check standard, at different temperatures using separate temperature control hardware. This allows the system to measure temperature coefficients.
- Product: Calibrated Leaks
- Gas: Helium
- Calibration Method: Comparison
- Leak Rate: 1 x 10⁻¹º to 5 x 10⁻⁴ atm-cc/sec
- Turbo Pump Size: 67 L/Sec
- Port Capacity: Four
- Temperature Enclosure Size: 2 ft ³ (Qty 2)
- Installation Date: 2017
ΔP ΔV Primary Leak Calibration System
Overview
VTI’s Delta P Delta V Primary Leak Calibration System (dPdV-PLCS) is engineered to provide reliable in-house recalibration and certification of calibrated leaks.
This fully-automated system is based on the rate of rise primary method for calibrating leaks. Also included, is a Residual Gas Analyzer (RGA) for verifying gas concentrations and leak testing the system. The three test ports are surrounded by a temperature enclosure that automatically controls the temperature based on operator inputs. The bake-out enclosure containing the high vacuum portion of the system, reduces pump times by accelerating outgassing.
VTI has been the leader in providing leak calibration services, and VTI utilizes this experience in the systems that we have designed and built for our customers.
- Product: Calibrated Leaks
- Gas: All Types
- Calibration Method: Primary
- Leak Rate: 1 x 10⁻⁹ to 1 x 10⁻⁴ atm-cc/sec
- Port Capacity: Three
- Measurement: MKS SRG & Baraton Equipment
- Turbo Pump Size: 67 L/sec
- Installation Date: 2014